Optically Detectable Reference Feature for Processing a Semiconductor Wafer

ABSTRACT

A semiconductor wafer has a semiconductor body, an insulation layer on the semiconductor body, a scribeline region designated to be subjected to a wafer separation processing stage, and an optically detectable reference feature laterally spaced inward from the scribeline region and configured to serve as a reference position during the wafer separation processing stage. A corresponding method of processing the semiconductor wafer, a power semiconductor die and a semiconductor wafer separation apparatus are also described.

TECHNICAL FIELD

This specification refers to embodiments of a semiconductor wafer, toembodiments of a power semiconductor die, to embodiments of a method ofprocessing a semiconductor wafer, and to embodiments of a semiconductorwafer separation apparatus. In particular, this specification relates toembodiments of a semiconductor wafer that comprises one or moreoptically detectable reference features for die separation, toembodiments of a power semiconductor die that comprises at least oneoptically detectable reference feature for die separation, toembodiments of a method of processing a semiconductor wafer thatcomprises one or more optically detectable reference features for dieseparation, and to embodiments of a semiconductor wafer separationapparatus configured to separate a semiconductor wafer comprising one ormore optically detectable reference features into a plurality of powersemiconductor dies.

BACKGROUND

Many functions of modern devices in automotive, consumer and industrialapplications, such as converting electrical energy and driving anelectric motor or an electric machine, rely on power semiconductordevices.

For example, Insulated Gate Bipolar Transistors (IGBTs), Metal OxideSemiconductor Field Effect Transistors (MOSFETs) and diodes, to name afew, have been used for various applications including, but not limitedto switches in power supplies and power converters.

A power semiconductor device usually comprises a power semiconductor dieconfigured to conduct a load current along a load current path betweentwo load terminals of the die. Further, the load current path may becontrolled by means of an insulated electrode, sometimes referred to asgate electrode. For example, upon receiving a corresponding controlsignal from, e.g., a driver unit, the control electrode may set thepower semiconductor device in one of a conducting state and a blockingstate.

Regarding the manufacturing process, a plurality of power semiconductordies are usually simultaneously processed within a single wafer; i.e.,after having been processed, the semiconductor wafer may include aplurality of power semiconductor dies. These power semiconductor diesmay be separated from each other by means of scribelines.

The wafer is then subjected to a separation processing stage, e.g.,including a dicing and/or sawing step, and the wafer is divided into theplurality of separate power semiconductor dies by breaking (e.g., bysawing and/or dicing) the wafer at the scribelines. After a qualitycheck, the dies may then be enclosed in a respective package andthereafter be delivered to the customer.

Said quality check may include checking, if the die has been damagedduring the separation processing step. For example, during theseparation, an insulation layer that was exposed to the separation maybecome damaged and/or a crack may extend into the edge terminationregion of one of the dies. For example, if considered to be damaged or,respectively, if it cannot reliably ensured that the die has not beendamaged, the die is not packaged but discarded.

Naturally, the portion of the wafer that is used for the scribelinescannot be used as die area. Hence, it is desirable to design thescribelines as small as possible. But, the requirements regardingaccuracy of the separation processing stage increase as the scribelinedecreases in dimension.

SUMMARY

Certain aspects of the present specification are related to an opticallydetectable reference feature that serves as a landmark for carrying outthe wafer separation processing stage. For example, the separationprocessing stage includes the step of acquiring position data indicativeof the position of the optically detectable reference feature andcontrolling a relative movement between the wafer and a wafer separationdevice (e.g., a laser dicing device or a sawing device) based on theposition data. For example, the optically detectable reference featureis spatially displaced from the scribelines.

According to an embodiment, a semiconductor wafer has: a semiconductorbody; an insulation layer on the semiconductor body; an active regionwith a power semiconductor die, the active region forming a part of thesemiconductor body; a scribeline region arranged adjacent to the activeregion; a passivation structure arranged above the insulation layer andso as to expose a section of the insulation layer, the exposed sectionbeing terminated by a termination edge of the passivation structure; anoptically detectable reference feature configured to serve as areference position during a wafer separation processing stage. Theoptically detectable reference feature is: (i) included in the activeregion, (ii) spatially displaced from the termination edge, and (iii)exposed by the passivation structure.

According to another embodiment, a method of processing a semiconductorwafer comprises providing a semiconductor wafer, the semiconductor wafercomprising: a semiconductor body; an insulation layer on thesemiconductor body; an active region with a power semiconductor die, theactive region forming a part of the semiconductor body; a scribelineregion arranged adjacent to the active region; a passivation structurearranged above the insulation layer and so as to expose a section of theinsulation layer, the exposed section being terminated by a terminationedge of the passivation structure. The method further comprises:providing an optically detectable reference feature configured to serveas a reference position during a wafer separation processing stage. Theoptically detectable reference feature is: (i) included in the activeregion, (ii) spatially displaced from the termination edge, and (iii)exposed by the passivation structure.

According to another embodiment, a power semiconductor die has: asemiconductor body; an insulation layer on the semiconductor body; anactive region, the active region forming a part of the semiconductorbody; a remaining portion of a semiconductor wafer scribeline regionarranged adjacent to the active region; a passivation structure arrangedabove the insulation layer and so as to expose a section of theinsulation layer, the exposed section being terminated by a terminationedge of the passivation structure; an optically detectable referencefeature configured to serve as a reference position during a waferseparation processing stage. The optically detectable reference featureis: (i) included in the active region, (ii) spatially displaced from thetermination edge, and (iii) exposed by the passivation structure.

According to a further embodiment, a method of processing asemiconductor wafer comprises providing the semiconductor wafer, whereinthe semiconductor wafer has: a semiconductor body; an insulation layeron the semiconductor body; an active region with a power semiconductordie, the active region forming a part of the semiconductor body; ascribeline region arranged adjacent to the active region; a passivationstructure arranged above the insulation layer and so as to expose asection of the insulation layer, the exposed section being terminated bya termination edge of the passivation structure; an optically detectablereference feature configured to serve as a reference position during awafer separation processing stage. The optically detectable referencefeature is: (i) included in the active region, (ii) spatially displacedfrom the termination edge, and (iii) exposed by the passivationstructure. The method further comprises: acquiring position dataindicative of a position of the optically detectable reference feature;and controlling a relative movement between the semiconductor wafer anda wafer separation device based on the position data.

According to a yet further embodiment, a semiconductor wafer separationapparatus for separating a semiconductor wafer into a plurality of powersemiconductor dies is presented. The apparatus comprises a receiverdevice configured to receive the semiconductor wafer. The semiconductorwafer has: a semiconductor body; an insulation layer on thesemiconductor body; an active region with a power semiconductor die, theactive region forming a part of the semiconductor body; a scribelineregion arranged adjacent to the active region; a passivation structurearranged above the insulation layer and so as to expose a section of theinsulation layer, the exposed section being terminated by a terminationedge of the passivation structure; an optically detectable referencefeature configured to serve as a reference position during a waferseparation processing stage. The optically detectable reference featureis: (i) included in the active region, (ii) spatially displaced from thetermination edge, and (iii) exposed by the passivation structure. Theapparatus further comprises: a detector configured to acquire positiondata indicative of a position of the optically detectable referencefeature; a computing device configured to receive the position data andcourse data, the course data being associated with the semiconductorwafer and defining a course of the at least one scribeline region withrespect to the position of the at least one optically detectablereference feature; and a wafer separation device coupled to thecomputing device and configured to separate the semiconductor wafer intothe plurality of power semiconductor dies, wherein the computing deviceis configured to control the wafer separation device based on theposition data and the course data.

Those skilled in the art will recognize additional features andadvantages upon reading the following detailed description, and uponviewing the accompanying drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

The parts in the figures are not necessarily to scale, instead emphasisbeing placed upon illustrating principles of the invention. Moreover, inthe figures, like reference numerals may designate corresponding parts.In the drawings:

FIGS. 1A-1C each schematically and exemplarily illustrate a section of ahorizontal projection of a semiconductor wafer;

FIG. 2A schematically and exemplarily illustrates a section of avertical cross-section of a power semiconductor die;

FIG. 2B schematically and exemplarily illustrates a section of ahorizontal projection of a power semiconductor die;

FIG. 3A-3C each schematically and exemplarily illustrates a section of avertical cross-section of a semiconductor wafer;

FIG. 4 schematically and exemplarily illustrates a section of ahorizontal projection of a semiconductor wafer in accordance with one ormore embodiments;

FIG. 5 schematically and exemplarily illustrates a section of ahorizontal projection of a semiconductor wafer in accordance with one ormore embodiments;

FIG. 6 schematically and exemplarily illustrates a section of a verticalcross-section of a semiconductor wafer in accordance with one or moreembodiments;

FIG. 7 schematically and exemplarily illustrates a section of a verticalcross-section of a power semiconductor die in accordance with one ormore embodiments;

FIG. 8 schematically and exemplarily illustrates a flow diagram of amethod of processing a semiconductor wafer in accordance with one ormore embodiments; and

FIG. 9 schematically and exemplarily illustrates a block diagram of asemiconductor wafer separation apparatus in accordance with one or moreembodiments.

DETAILED DESCRIPTION

In the following detailed description, reference is made to theaccompanying drawings which form a part hereof and in which are shown byway of illustration specific embodiments in which the invention may bepracticed.

In this regard, directional terminology, such as “top”, “bottom”,“below”, “front”, “behind”, “back”, “leading”, “trailing”, “above” etc.,may be used with reference to the orientation of the figures beingdescribed. Because parts of embodiments can be positioned in a number ofdifferent orientations, the directional terminology is used for purposesof illustration and is in no way limiting. It is to be understood thatother embodiments may be utilized and structural or logical changes maybe made without departing from the scope of the present invention. Thefollowing detailed description, therefore, is not to be taken in alimiting sense, and the scope of the present invention is defined by theappended claims.

Reference will now be made in detail to various embodiments, one or moreexamples of which are illustrated in the figures. Each example isprovided by way of explanation, and is not meant as a limitation of theinvention. For example, features illustrated or described as part of oneembodiment can be used on or in conjunction with other embodiments toyield yet a further embodiment. It is intended that the presentinvention includes such modifications and variations. The examples aredescribed using specific language which should not be construed aslimiting the scope of the appended claims. The drawings are not scaledand are for illustrative purposes only. For clarity, the same elementsor manufacturing steps have been designated by the same references inthe different drawings if not stated otherwise.

The term “horizontal” as used in this specification intends to describean orientation substantially parallel to a horizontal surface of asemiconductor substrate or of a semiconductor structure. This can be forinstance the surface of a semiconductor wafer or a die. For example,both the (first) lateral direction X and the (second) lateral directionY mentioned below can be horizontal directions, wherein the firstlateral direction X and the second lateral direction Y may beperpendicular to each other.

The term “vertical” as used in this specification intends to describe anorientation which is substantially arranged perpendicular to thehorizontal surface, i.e., parallel to the normal direction of thesurface of the semiconductor wafer/chip/die. For example, the verticaldirection Z mentioned below may be an extension direction that isperpendicular to both the first lateral direction X and the secondlateral direction Y.

In the context of the present specification, the terms “in ohmiccontact”, “in electric contact”, “in ohmic connection”, and“electrically connected” intend to describe that there is a low ohmicelectric connection or low ohmic current path between two regions,sections, zones, portions or parts of the device described herein.Further, in the context of the present specification, the term “incontact” intends to describe that there is a direct physical connectionbetween two elements of the respective semiconductor device; e.g., atransition between two elements being in contact with each other may notinclude a further intermediate element or the like.

In addition, in the context of the present specification, the term“electric insulation” is used, if not stated otherwise, in the contextof its general valid understanding and thus intends to describe that twoor more components are positioned separately from each other and thatthere is no ohmic connection connecting those components. However,components being electrically insulated from each other may neverthelessbe coupled to each other, for example mechanically coupled and/orcapacitively coupled and/or inductively coupled. To give an example, twoelectrodes of a capacitor may be electrically insulated from each otherand, at the same time, mechanically and capacitively coupled to eachother, e.g., by means of an insulation, e.g., a dielectric.

Specific embodiments described in this specification pertain to, withoutbeing limited thereto, a power semiconductor die, e.g., a powersemiconductor die that may be used within a power converter or a powersupply. Thus, in an embodiment, such die can be configured to carry aload current that is to be fed to a load and/or, respectively, that isprovided by a power source. For example, the die may comprise one ormore active power semiconductor cells, such as a monolithicallyintegrated diode cell, and/or a monolithically integrated transistorcell, and/or a monolithically integrated IGBT cell, and/or amonolithically integrated RC-IGBT cell, and/or a monolithicallyintegrated MOS Gated Diode (MGD) cell, and/or a monolithicallyintegrated MOSFET cell and/or derivatives thereof. A plurality of suchdiode cells and/or such transistor cells may be integrated in the die.

The term “power semiconductor die” as used in this specification maydescribe a single die, e.g., with high voltage blocking and/or highcurrent-carrying capabilities. In other words, such power semiconductordie is intended for high current, typically in the Ampere range, e.g.,up to 5 or 100 Amperes, and/or voltages typically above 15 V, moretypically up to 40 V, and above, e.g., up to at least 500 V or more than500 V, e.g. at least 600 V or at least a few kV, e.g., in case of a highpower IGBT.

For example, the power semiconductor die described below may be a diethat is configured to be employed as a power component in a low-,medium- and/or high voltage application.

FIGS. 1A-C each schematically and exemplarily illustrate a section of ahorizontal projection of a semiconductor wafer 200, FIGS. 2A-Billustrate a vertical cross-section and a horizontal projection of apower semiconductor die 100, and FIGS. 3A-C each schematically andexemplarily illustrate a section of a horizontal projection of thesemiconductor wafer 200.

In the following, it will be referred to all of the aforementionedFigures. Whereas none of the aforementioned Figures is explicitlydescribed as illustrating an embodiment, it shall be understood that theembodiments described with respect to the remaining drawings (FIGS. 4-9)may include one or more or all of the features described in thefollowing with respect to FIGS. 1A-3C.

The semiconductor wafer 200 has a semiconductor body 10 (as can be bestseen in FIGS. 3A-C). For example, the semiconductor body 10 is based onsilicon (Si). In another example, the semiconductor body 10 is based ona different material, e.g. silicon carbide (SiC), gallium nitride (GaN),gallium arsenide (GaAs) or another wide bandgap material.

A thickness of the semiconductor body 10 along the vertical direction Zmay be within the range of 5 μm to 300 μm. In an example, thesemiconductor body thickness 10 is below a maximum value, e.g., so as toallow for separation by means of laser dicing, e.g., below 100 μm orbelow 80 μm. A diameter of the semiconductor wafer (in the followingalso simply referred to as “wafer”), e.g., along the first lateraldirection X, may be within range of 4 to 16 inches, e.g., up to 12inches, in accordance with an example.

Returning to FIGS. 1A-C, the wafer 200 may include one or more activeregions 210, and one or more scribeline regions 220 arranged adjacent tothe active regions 210, e.g. laterally (horizontally) adjacent to theactive regions 210. The active regions 210 and the scribeline regions220 may exhibit a common vertical extension range corresponding to thethickness of the semiconductor body 10.

Both the scribeline regions 220 and the active regions 210 form a partof the semiconductor body 10. In other words, the semiconductor body 10may form the main portions of both the scribeline regions 220 and theactive regions 210.

For example, each active region 210 has at least one power semiconductordie 100 (as schematically and exemplarily illustrates in FIGS. 2A-B).For example, each active region 210 integrates the at least one powersemiconductor die 100. Each power semiconductor die 100 may comprise oneor more of the following: a diode, a transistor, a MOSFET, an IGBT, anRC-IGBT, a sensor, a CMOS, an IC (integrated circuit). Suchconfigurations are generally known to the skilled person and are henceherein not described in greater detail.

For example, processing of the semiconductor wafer 200 occurs mainly ata wafer front side 290; e.g., the wafer front side 290 can be subjectedto a plurality of processing steps including, for example, one or moreimplantation processing steps, one or more epitaxy processing steps, oneor more deposition processing steps, one or more lithographic processingsteps, one or more etching processing steps and the like. For example,at the wafer back side 280 (cf. FIG. 3A), a homogeneously formed (i.e.unstructured) back side metallization layer 212 is provided. Forexample, this metallization layer 212 forms a part of a load terminal ofeach power semiconductor die 100, e.g., a drain terminal, a collectorterminal or a cathode terminal.

Processing the wafer front side 290 may comprise creating an insulationlayer 11 on the semiconductor body 10, as illustrated in each of FIGS.2A-3C. For example, the insulation layer 11 comprises an intermediateoxidation layer (German: “Zwischenoxidschicht” or “ZWOX”). Further, theinsulation layer 11 can comprise an oxide. For example, the insulationlayer 11 comprises silicon oxide (SiO₂) and/or a borophosphosilicateglass (BPSG). In an example, the insulation layer 11 comprises a loweroxidation layer and an upper BPSG layer.

The insulation layer 11 can cover the semiconductor body 10, e.g., notonly in the active regions 210, but also at the scribeline regions 220.For example, the insulation layer 11 covers substantially the entiresemiconductor body 10 of the wafer 200. The insulation layer 11 may bearranged in a horizontal manner, e.g., such that a transition betweenthe insulation layer 11 and the semiconductor body 10 defines asubstantially horizontal plane. For example, both an upper surface 119and the lower surface 118 of the insulation layer 11 (cf. FIGS. 3A-C)define a substantially horizontal plane.

Within the active regions 210, e.g., within their respective activeareas (cf. reference numeral 180 in FIG. 2B), the insulation layer 11may be locally penetrated by contact means, e.g., contact stripes and/orcontact plugs 154 (cf. FIGS. 3A-C), that are arranged and configured tocontact a section of the semiconductor body 10, for example asemiconductor source region and/or a semiconductor body region and/or asemiconductor channel region (cf. reference numeral 102 in FIGS. 3A-C),or an electrode (cf. reference numerals 151, 153 in FIG. 3C). Forexample, a plurality of trenches 15 may extend into the semiconductorbody 10 along the vertical direction Z and may include trench electrodes151, 153 that are to be contacted. For example, such trench electrodescan include control electrodes 153 (FIG. 3C) that may need to beelectrically connected to a control terminal structure 150 (cf. FIG.10), e.g., a gate runner. Further, such trench electrodes can includefield electrodes 151 that may need to be electrically connected to aload terminal structure 110. For example, such load terminal structure110 and/or such control terminal structure 150 may be arranged above theinsulation layer 11, and said contact means 154 penetrating theinsulation layer 11 may serve as an electrical connection between theseterminal structures 110, 150 that are arranged on top of the uppersurface 119 of the insulation layer 11 on the one side and, on the otherside, the buried components (semiconductor regions and/or trenchelectrodes) that are arranged below the lower surface 118 of theinsulation layer 11.

Further, a passivation structure 13 may be arranged above the insulationlayer 11, e.g., exclusively within the active regions 210. For example,the passivation structure 13 covers the above-mentioned control terminalstructure 150 and load terminal structure 110, e.g., so as to providefor an electrical insulation between these terminal structures 110, 150.

In an example, the passivation structure 13 may include or is made of aninsulating material, e.g., imide. The passivation structure 13 may beconfigured to provide for an encapsulation. In addition, the passivationstructure 13 may be covered by a further insulating structure 17, e.g.,including or made of an epoxy material.

For example, the passivation structure 13 does not extend into thescribeline regions 220, but terminates within an edge termination region(cf. reference numeral 190 in FIG. 2B, also referred to as “high voltagetermination region”) of the power semiconductor die 100 included in therespective active region 210, e.g., by means of a termination edge 131.

As illustrated in more detail in FIG. 10, the passivation structure 13can be arranged above the insulation layer 11 and so as to expose thesection 111 of the insulation layer 11. Further, the passivationstructure 13 can be arranged above the insulation layer 11 so as tocover a section 112 of the insulation layer 11. For example, the coveredinsulation layer sections 112 are exclusively arranged within the activeregions 210.

E.g., within the active area 180, the passivation layer 13 may coversubstantially the entire insulation layer 11.

The exposed insulation layer section 111 may extend into each of theactive region 210 and the scribeline region 220. For example, the firstsubsection 1111 of the exposed insulation layer section 111 extends intothe active region 210. A second subsection 1112 of the exposedinsulation layer section 111 can be arranged within the scribelineregion 220.

As explained above, the scribeline region 220 can be designated to besubjected to a separation processing step, wherein, for example, a laserbeam or a sawing blade may be directed to the scribeline region 220,e.g., onto the surface of the second insulation layer subsection 1112.

Thus, in an example, once processing of the active regions 210 isfinished, the wafer 200 may be subjected to a separation processingstep, e.g., a dicing (e.g., laser dicing) or sawing processing step.During such separation processing step, the wafer 200 can be divided,along the scribeline regions 220, into the separate dies 100 which maythen be packaged and shipped to the customer. For example, eachscribeline region 220 includes a dicing (sawing) line (only illustratedin FIG. 10, cf. reference numeral 222) at the second insulation layersubsection 1112, along which a laser beam or sawing blade is directedfor carrying out the separation.

A width of the second insulation layer subsection 1112, e.g., along thefirst lateral direction X, can be within the range of some 10 μm, e.g.,within the range of 10 μm to 150 μm, e.g., 60 μm. For example, the widthof the second insulation layer subsection 1112 is chosen such that alaser beam or sawing blade with a diameter/thickness of, e.g., 20 μm anda lateral deviation of, e.g., +/−20 μm can be guided along the secondinsulation layer subsection 1112, e.g., without subjecting the firstinsulation layer subsection 1111 to the laser beam/sawing blade.

For example, the power semiconductor die 100 as illustrated in FIG. 2Ahas been a part of the semiconductor wafer 200 and has been cut out ofthe semiconductor wafer 200, wherein, thereby, the die edge 105 may havebecome into being. As illustrated in FIG. 2B, the power semiconductordie 100 may have the active area 180 and the edge termination region 190that surrounds the active area 180 and that is terminated by the dieedge 105. The passivation structure 13 may be arranged so as to coversubstantially the entire active area 180 and, only partially, the edgetermination region 190. Of course, the passivation structure 13 may bepartially structured within the active area 180, e.g., so as to allowexternal contacts, e.g., bonding wires, to contact a load terminalstructure and/or a control terminal structure arranged on the insulationlayer 11, e.g. the load terminal structure 110. As explained above, theback side metallization 212 mentioned with respect to FIG. 3A can formanother load terminal structure of the power semiconductor die 100, e.g.load terminal structure 120 at the back side of the power semiconductordie 100.

FIGS. 1B-C both schematically and exemplarily illustrate a section of ahorizontal projection of the semiconductor wafer 200, said sectionincluding four adjacent active regions 210. For example, a firstseparating processing step has been carried out along a dicing line 222(cf. FIG. 1C) included in the scribeline regions 220. For example, dueto such first separating processing step, the second insulation layersubsection 1112 (cf. FIG. 1) may have been at least partially removed.The crosshatched area illustrates the first insulation layer subsections1111 that extend laterally from the respective die edges 105 to theoutermost termination edges 131 of the passivation structures 13.

As has further been explained above, the passivation structure 13 may bestructured, e.g., so as to expose a terminal structure, e.g., terminalstructure 150, which may be a control terminal structure, and comprise,for example, a gate runner. The terminal structure 150, e.g., includingthe gate runner, may be at least partially covered by an encapsulation,e.g., made of an insulating material, e.g., imide.

FIGS. 3A-C—as already mentioned above—each schematically and exemplarilyillustrate a section of a vertical cross-section of the semiconductorwafer 200 with two adjacent active regions 210.

Accordingly, a plurality of trenches 15 may extend into thesemiconductor body 10 along the vertical direction Z. Each of theplurality of trenches 15 may include a trench electrode 151 and a trenchinsulator 152 that insulates the trench electrode 151 from thesemiconductor body 10. The trenches 15 may be arranged both within theactive regions 210 and within the scribeline region 220.

For example, a first subset of the plurality of trenches 15 can bearranged in the active region 210, wherein, in FIGS. 3A-C, only arespective section of the edge termination regions (cf. referencenumeral 190 in FIG. 2B) is illustrated. The first subset can include atleast one trench 15 that laterally overlaps with the first insulationlayer subsection 1111. In the illustrated examples, seven (FIG. 3A) orsix (FIG. 3B) or four (FIG. 3C) trenches 15 laterally overlap with thefirst insulation layer subsection 1111 in the active region 210.

A second subset of the plurality of trenches 15 can be arranged in thescribeline region 220, wherein each of the second subset of theplurality of trenches 15 laterally overlaps with the second insulationlayer subsection 1112.

In accordance with an example, the first subset of the plurality oftrenches 15 and the second subset of the plurality of trenches 15 are ofidentical spatial dimensions, e.g., with respect to the total extensionalong the vertical direction Z and/or with respect to the trench widthalong the first lateral direction X. Additionally or alternatively, thefirst subset of the plurality of trenches 15 and the second subset ofthe plurality of trenches 15 are arranged in accordance with the sametrench pattern, e.g., with respect to a lateral distance along the firstlateral direction X between two adjacent trenches 15 (also referred toas “pitch”). In another example, the trenches 15 within the scribelineregions 220 can be arranged in accordance with a greater pitch ascompared to the trenches 15 within the active regions 210.

For example, the trench formation process carried out for forming thetrenches within the active area 180 of each power semiconductor die 100of the active regions 210, e.g., for forming control trenches, gatetrenches, field plate trenches and the like, is simultaneously carriedout, in a similar or identical fashion, within the scribeline regions220, which can be beneficial regarding uniformity. Thus, even thoughsuch trenches 15 in the scribeline regions 210 are not needed forcontrolling operation of the power semiconductor dies 100, they maynevertheless be formed within these regions 220 so as to provide for ahigh uniformity within the entire wafer 200.

Further, a plurality of contact plugs 154 can be employed for contactingthe trench electrodes 151 and/or the semiconductor body 10, wherein eachof the contact plugs 154 may extend from the upper surface 119 of theinsulation layer 11 to the lower surface 118 of the insulation layer 11.The use of such contact plugs 154 is generally known to the skilledperson. For example, depending on the design of the power semiconductordies 100, e.g., a needle trench design or a stripe trench design, suchcontact plugs 154 may be configured as contact stripes or as contactneedles. They may penetrate through the insulation layer 11 and extendfurther along the vertical direction Z as compared to the lower surface118 of the insulation layer 11, e.g., so as to contact a region of thesemiconductor body 10, e.g., a source region, a channel region or thebody region (reference numeral 102) within the active region 180.

For example, as illustrated in FIGS. 3A-C, a frontside metallization 110is arranged above the insulation layer 11 and below the passivationstructure 13, wherein the frontside metallization 110 is electricallyconnected to the semiconductor body 10 in the active area 180 of thepower semiconductor die 100. This front side metallization 110 may forma part of a load terminal structure of the power semiconductor die 100,e.g., a part of a source terminal structure, an emitter terminalstructure or an anode terminal structure. As already explained, theactive area 180 can be laterally displaced from the first insulationlayer subsection 1111. For example, in order to provide for saidelectrical connection between the front side metallization/load terminalstructure 110 and the semiconductor body 10 and/or between the frontside metallization 110 and the trench electrodes 151, said contact plugs154 may be employed.

In accordance with the examples schematically illustrated in each ofFIGS. 3A-C, an interruption structure 14 may be provided that is coveredby the passivation structure 13. For example, also the interruptionstructure 14 may penetrate the insulation layer 11, e.g., at the coveredinsulation layer section 112. As illustrated in FIGS. 3A-C, theinterruption structure 14 may comprise an interruption contact plug 144or an interruption contact well 142, wherein the contact plug 144 or,respectively, the interruption contact well 142 may electrically contactthe semiconductor body 10.

For example, the interruption structure 14 is configured to block alaterally extending peel-off of the insulation layer 11, wherein thelaterally extending peel-off of the insulation layer may undercircumstances occur during the wafer separation processing stage.

The total number of trenches 15 included in the scribeline region 220may depend on a trench pattern that is being employed for forming thetrenches 15 in the active region 210. For example, for powersemiconductor dies with a lower voltage rating, the trench pattern witha comparatively small pitch may be employed (cf. FIG. 3A-C), whereas forpower semiconductor dies with a higher voltage rating, the trench but inwith a comparatively larger pitch may be employed.

FIG. 4 schematically and exemplarily illustrates a section of ahorizontal projection of a semiconductor wafer 200 in accordance withone or more embodiments. The semiconductor wafer 200 has a semiconductorbody 10 (not visible in FIG. 4); an insulation layer 11 on thesemiconductor body 10; an active region 210 with a power semiconductordie 100 (not visible in FIG. 4), the active region 210 forming a part ofthe semiconductor body 10; a scribeline region 220 arranged adjacent tothe active region 210; a passivation structure 13 arranged above theinsulation layer 11 and so as to expose a section 111 of the insulationlayer 11, the exposed section 111 being terminated by a termination edge131 of the passivation structure 13.

Regarding optional implementations of the semiconductor body 10, theinsulation layer 11, the active region 210, the power semiconductor die100, the scribeline region 210, and of the passivation structure 13, itis referred to description above.

In an embodiment, the wafer 200 comprises an optically detectablereference feature 12 configured to serve as a reference position duringa wafer separation processing stage.

The optically detectable reference feature 12 is: (i) included in theactive region 210, (ii) spatially displaced from the termination edge131, and (iii) exposed by the passivation structure 13.

The optically detectable reference feature 12 may be configured to beoptically detected by a component of a semiconductor wafer separationapparatus (cf. FIG. 9). As used herein, the term “optically detectable”may refer to configuration that can be detected by means of processingan image of the wafer 200, the image including a representation of theoptically detectable reference feature 12, e.g., an image of the frontside 290 of the wafer 200. For example, such image of the wafer 200 maybe taken by means of a digital camera positioned above the wafer 200.For example, in order to optically detect the reference feature 12, itis not necessary to process the wafer 200 besides placing the wafer 200into a field of view of the digital camera.

For example, the course of the scribeline region 220 (along which thewafer separation must occur) may be defined with respect to the positionof the optically detectable reference feature 12, e.g., by means ofcorresponding course data. For carrying out the wafer separation, theposition of the optically detectable reference feature 12 may bedetermined and, based on the determined position, the wafer 200 may bedivided into a plurality of separate power semiconductor dies 100 bybreaking (e.g., by the dicing or sawing) the wafer 200 along thescribeline region 220.

In an embodiment, the optically detectable reference feature 12 isentirely exposed to the environment, i.e., at least above the section ofthe insulation layer 11 covering and/or including the opticallydetectable the reference feature 12, there is not arranged any componentof the wafer 200. For example, the optically detectable referencefeature 12 is not covered.

For example, the passivation structure 13 comprises an opening 132 thatexposes the optically detectable reference feature 12. The opening 132may exhibit a maximum lateral extension (e.g., in both the first and thesecond lateral direction) substantially as great as a width of thescribeline region 220, e.g., within the range of 20% to 200% of thewidth of the scribeline region 220, which may be, as indicated above,within the range of some 10 μm.

The opening 132 may be spatially confined by a closed opening edge 1321of the passivation structure 13. In an embodiment, a minimum distancebetween the closed opening edge 1321 and the termination edge 131 iswithin the range of 5 μm to 50 μm.

The opening 132 may not only expose the optically detectable referencefeature 12, but also a subsection 1113 of the insulation layer 11 (cf.FIGS. 5 to 7). As will be explained in more detail below, the opticallydetectable reference feature 12 may for example extend into and/orunderneath the subsection 1113 of the insulation layer 11 that isexposed by the opening 132.

Another opening 133 of the passivation structure 13 may for exampleexpose a portion of terminal structure of the die 100, e.g., the loadterminal structure 110 as mentioned above.

For example, the passivation structure 13 may exhibit a plurality ofopenings, and the opening 132 exposing the optically detectablereference feature 12 can be the opening that is arranged closest to thetermination edge 131.

Hence, in an embodiment, the optically detectable reference feature 12is spatially displaced from the termination edge 131 of the passivationstructure 13 such that it is included within the active region 210 andnot in the scribeline region 220. Further, the optically detectablereference feature 12 is not covered by the passivation structure 13, butexposed by the passivation structure 13, thereby allowing a device (cf.reference numeral 520 in FIG. 9) to optically detect the opticallydetectable reference feature 12.

FIG. 5 schematically and exemplarily illustrates a section of ahorizontal projection of the semiconductor wafer 200 in accordance withone or more embodiments, and FIG. 6 schematically and exemplarilyillustrates a section of a vertical cross-section of the semiconductorwafer 200 in accordance with one or more embodiments, wherein theillustrated cross-section corresponds to a vertical cut at line AA′shown in FIG. 5.

Accordingly, two adjacent active regions 210 may be laterally separatedfrom each other by means of exposed section 111 of the insulation layer11 spatially confined by the termination edges 131 of the passivationstructures 13. The exposed section 111 of the insulation layer 11extends into the scribeline region 220. For example, the portion of thesemiconductor body 10 that belongs to the scribeline region 220 ispartially or entirely covered by the exposed section 111 of theinsulation layer 11. As already indicated further above, the firstsubsections 1111 of the exposed insulation layer section 111 can extendinto the active regions 210, and the second subsection 1112 of theexposed insulation layer section 111 can extend into the scribelineregion 220.

The optically detectable reference feature 12 is arranged within one ofthe active regions 210 (wherein, of course, the wafer 200 may compriseone or more additional optically detectable reference features 12 thatmay be arranged in the same or other active regions 210). As alreadyexplained above, the optically detectable reference feature 12 isspatially displaced from the termination edge 131. For example, thecourse of the scribeline region 210 is devoid of any portion of theoptically detectable reference feature 12; e.g., in terms of structuralconfiguration, the optically detectable reference feature 12 does notspatially confine the course of the scribeline region 210.

As illustrated in FIG. 6, the optically detectable reference feature 12can extend into the semiconductor body 10, i.e., underneath the exposedsubsection 1113 of the insulation layer 11. For example, the opticallydetectable reference feature 12 comprises a trench structure 121 thatextends into the semiconductor body 10. The trench structure can includeone or more separate trenches or, as illustrated in FIGS. 6 and 7, aclosed trench structure formed by a contiguous trench that extends intothe semiconductor body 10.

For example, the wafer 200, e.g., the active region 210 and/or thescribeline region 220, includes processed portions formed within ahorizontal sublayer 104 of the semiconductor body 10, wherein thehorizontal sublayer 104 is arranged below and, optionally, in contactwith the insulation layer 11, and wherein the optically detectablereference feature 12 extends into the horizontal sublayer 104. Forexample, the horizontal sublayer 104 is an epitaxially grownsemiconductor region and/or is arranged above a substrate region 105 ofthe semiconductor body 105.

The processed portions of the horizontal sublayer 104 of thesemiconductor body 10 may include doped semiconductor regions, e.g., abody region 102 (e.g., p-doped) and/or a source region (e.g., n-doped,not illustrated), guard ring regions or channel stopper regions (notillustrated) and the like. The processed portions of the horizontalsublayer 104 of the semiconductor body 10 may further include trenches15, as has already been explained with respect to FIGS. 3A-C.

In an embodiment, the optically detectable reference feature 12 and atleast one component of the processed portions 102, 15 exhibit a commonvertical extension range of at least 20%, of at least 50% or even of atleast 80% of the total extension of the at least one component of theprocessed portions 102, 15 along the vertical direction Z.

For example, the trench structure 121 of the optically detectablereference feature 12 is produced in the same manner, e.g.,simultaneously with the trenches 15. Hence, the same level of accuracythat applies during processing the trenches 15 may equivalently apply tothe optically detectable reference feature 12. Thus, controlling thewafer separation processing stage based on the position and/or thelayout of the optically detectable reference feature 12 can be carriedout with comparatively high accuracy. E.g., in contrast, due to theprocess, the course of the termination edge 131 of the passivationstructure 13 may exhibit an undesired variation of some micrometerswhich would correspondingly influence the wafer separation processingstage if the same would be based on the course of the termination edge131.

For example, the trench(es) of the trench structure 121 may hence alsoinclude a trench electrode 1211 that is insulated from the semiconductorbody 10 by means of a trench insulator 1222. Further, the opticallydetectable reference feature 12 may exhibit the substantially same totalextension along the vertical direction Z (depth) as the plurality ofsaid trenches 15. But, as the layout of the trench structure 121 of theoptically detectable reference feature 12 can be different as comparedto the layout of the trenches 15 (which may, e.g., be stripe trenches ofequal form), the total depth of the trench(es) of the trench structure121 may be slightly different from the depth of the trenches 15. E.g., awidth of the trench(es) of the trench structure 121 of the opticallydetectable reference feature 12 can be greater as the respective widthof the trenches 15, and, depending on the process, this may yield agreater depth of the trench structure 121.

It shall be understood that the insulation layer 11 can be transparent;e.g., transparent for a detector (cf. reference numeral 520 mentionedfurther below), e.g., an optical microscope.

Further, in contrast to the trenches 15 that may be arranged withinactive region 210 and that can be designated to contribute in the activeoperation of the power semiconductor die 100, e.g., for the purpose ofcontrolling a load current, the trench structure 121 of the opticallydetectable reference feature 12, even though forming a part of theactive region 210, does for example not serve the purpose of controllingthe active operation of the power semiconductor die 100, but ratherserves, e.g., exclusively, the purpose of being optically detected,e.g., located, by means of a semiconductor wafer separation apparatus,and hence serves for nothing else as a landmark for carrying out thewafer separation processing stage.

For example, the trench electrode(s) 1211 of the trench structure 121 ofthe optically detectable reference feature 12 may be electricallyfloating. Hence, the trench electrode(s) 1211 of the trench structure121 of the optically detectable reference feature 12 are notelectrically connected to the load terminal structure 110 or to thecontrol terminal structure 150 of the power semiconductor die 100.

In an embodiment, the optically detectable reference feature 12exhibits, in a horizontal cross-section, a non-symmetrical layout. Anexample of the non-symmetrical layout is illustrated in FIG. 6;accordingly, the optically detectable reference feature 12 exhibits, ina horizontal cross-section, a non-symmetrical layout in the form ofclosed G-course. Of course, other non-symmetrical layouts are possible,e.g., an L-course or the like. The non-symmetrical layout may facilitatecontrol of the wafer separation processing stage, as differenthorizontal (i.e., lateral) directions may be orientated based on one andthe same optically detectable reference feature 12. E.g., based on theposition and layout of the optically detectable reference feature 12, amovement along the scribelines 220 necessary for carrying out the waferseparation can be controlled more reliably in both the first lateraldirection X and the second lateral direction Y based one and the sameoptically detectable reference feature 12.

Generally, it is possible that the optically detectable referencefeature 12 is made of one or more materials different from both thematerial of the passivation structure 13 and a metal. Hence, in anembodiment, the optically detectable reference feature 12 is neither aportion of the passivation structure 13 nor a portion of the terminalstructures that may be included in the active area 210. As explainedabove, the optically detectable reference feature 12 can be producedsimultaneously with portions implemented within the horizontal sublayer104, and, hence, the optically detectable reference feature 12 can bebased on materials like a poly-doped semiconductor material (e.g.,trench electrode 1211) and a semiconductor oxide (e.g., the trenchinsulator 1222).

Further, in an embodiment, the optically detectable reference feature 12does also not form a portion of the insulation layer 11, and theoptically detectable reference feature 12 is made of a materialdifferent from the material of the insulation layer 11.

Presented herein is also a power semiconductor die. The powersemiconductor die has: a semiconductor body; an insulation layer on thesemiconductor body; an active region, the active region forming a partof the semiconductor body; a remaining portion of a semiconductor waferscribeline region arranged adjacent to the active region; a passivationstructure arranged above the insulation layer and so as to expose asection of the insulation layer, the exposed section being terminated bya termination edge of the passivation structure; an optically detectablereference feature configured to serve as a reference position during awafer separation processing stage. The optically detectable referencefeature is: (i) included in the active region, (ii) spatially displacedfrom the termination edge, and (iii) exposed by the passivationstructure.

Regarding optional implementations of the components of the powersemiconductor die (cf. reference numeral 100 in the drawings), it isreferred to the above. E.g., what has been described above with respectto the semiconductor body 10, the insulation layer 11 the active region210, scribeline region 220, the passivation structure 13 and theoptically detectable reference feature 12 may equally apply to thecorresponding components of the power semiconductor die presentedherein. FIG. 7 schematically and exemplarily illustrates a section of avertical cross-section of the power semiconductor die 100 in accordancewith one or more embodiments.

For example, the optically detectable reference feature 12 comprises oneor more contact plugs 122 that extend into the insulation layer 11. Forexample, the contact plugs 122 penetrate the insulation layer 11, e.g.,so as to co-planarily terminate with both the upper surface 119 and thelower surface 118 of the insulation layer 11.

In an embodiment, the optically detectable reference feature 12 maycomprise, irrespective of being part of the entire wafer 200 or theseparate die 100, both the contact plugs 122 and the trench structure121 mentioned above. For example, the contact plugs 122 may laterallyoverlap with the trench structure 121, e.g., so as to contact thetrenches (e.g., the trench electrodes 1211).

As described above, the optically detectable reference feature 12 mayhence exhibit a vertical overlap with at least one of the insulationlayer 11 and the semiconductor body 10. Not illustrated herein, but alsopossible, is that the optically detectable reference feature 12alternatively or additionally vertically overlaps with another layersection that is arranged below (but still exposed by) the passivationstructure 13, e.g., with a diffusion barrier layer or a tungsten layer.

Hence, it shall be understood that the optically detectable referencefeature 12 may comprise, instead or in addition to said trench structure121, a structure comprising a section of a diffusion barrier layerand/or a section of a tungsten layer. In another embodiment, theoptically detectable reference feature 12 may comprise, instead or inaddition to said trench structure 121, a contact structure, e.g., asexemplarily explained with respect to FIG. 7.

FIG. 8 schematically and exemplarily illustrates a flow diagram of amethod 300 of processing a semiconductor wafer in accordance with one ormore embodiments. The method 300 comprises providing (in step 310) thesemiconductor wafer, wherein the semiconductor wafer has: asemiconductor body; an insulation layer on the semiconductor body; anactive region with a power semiconductor die, the active region forminga part of the semiconductor body; a scribeline region arranged adjacentto the active region; a passivation structure arranged above theinsulation layer and so as to expose a section of the insulation layer,the exposed section being terminated by a termination edge of thepassivation structure; an optically detectable reference featureconfigured to serve as a reference position during a wafer separationprocessing stage. The optically detectable reference feature is: (i)included in the active region, (ii) spatially displaced from thetermination edge, and (iii) exposed by the passivation structure.

The method 300 further comprises: acquiring (in step 320) position dataindicative of a position of the optically detectable reference feature;and controlling (in step 340) a relative movement between thesemiconductor wafer and a wafer separation device based on the positiondata.

Regarding optional implementations of the components of the provided(cf. step 310) semiconductor wafer (cf. reference numeral 200 in thedrawings), it is referred to the above. E.g., what has been describedabove with respect to the semiconductor body 10, the insulation layer 11the active region 210, scribeline region 220, the passivation structure13 and the optically detectable reference feature 12 may equally applyto the corresponding components of the semiconductor wafer processed inaccordance with method 300.

In an embodiment, acquiring 320 the position data includes locating theoptically detectable reference feature 12 and, optionally, alsodetermining a layout of the optically detectable reference feature 12.E.g., acquiring 320 the position data includes carrying out an opticalcharacter recognition (OCR) processing step, e.g., the OCR processingstep is carried out on an image of the provided wafer 200 that has beencaptured by means of a digital camera. The general concepts of imageprocessing that may be carried in order to acquire the position dataindicative of the position (i.e., location) of the optically detectablereference feature 12 and, optionally, also indicative of the layout ofthe optically detectable reference feature 12, are known to the skilledperson and hence not explained in greater detail herein.

In a further embodiment, the method 300 includes separating (in step350) the semiconductor wafer 200 into at least two wafer components(i.e., in at least two separate power semiconductor dies 100) by causingthe wafer separation device to break (e.g., saw, laser dice and/orplasma etch) the semiconductor wafer 200 along the scribeline region 210while maintaining the optically detectable reference feature 12.

Breaking the semiconductor wafer 200 along the scribeline region 210 mayinclude at least one of a laser dicing processing step, a sawingprocessing step and a plasma etching processing step.

In accordance with one or more embodiments, the optically detectablereference feature 12 is hence maintained during the wafer separationprocessing stage. Thus, one or more of the separate power semiconductordies 100 may, after the wafer separation processing stage is finished,still be equipped with at least one respective optically detectablereference feature 12. For example, there is no need to remove therespective optically detectable reference feature 12 afterwards, and theseparate power semiconductor dies 100 may be packaged while stillexhibiting the optically detectable reference feature 12. However,within the course of further processing of the separate powersemiconductor dies 100, the optically detectable reference feature 12may then be covered by means of, e.g., a molding mass, or by means ofanother insulation structure. Hence, whereas the opening 132 of thepassivation structure 13 may still expose the optically detectablereference feature 12, said opening 132 may then be filled with aninsulating material. But, as indicated, the opening must not necessarilybe filled, but may instead remain empty.

In a further embodiment, the method 300 further includes providing (instep 330, which may be carried out before or after or simultaneouslywith step 320) course data, the course data defining a course of thescribeline region 210 with respect to the position of the opticallydetectable reference feature 12, and wherein the controlling (step 340)the relative movement includes moving the semiconductor wafer 200relative to the wafer separation device based on the course data. Forexample, the relative movement is caused by moving the wafer 200 and/orby moving the wafer separation device. Further, controlling 340 therelative movement between the semiconductor wafer 200 and the waferseparation device may occur independently from the course of thetermination edge 131 of the passivation structure 13. Hence, in anembodiment, the course of the termination edge 131 of the passivationstructure is not taken into account when dividing the wafer 200 into theplurality of power semiconductor dies 100.

FIG. 9 schematically and exemplarily illustrates a block diagram of asemiconductor wafer separation apparatus 500 for separating asemiconductor wafer into a plurality of power semiconductor dies inaccordance with one or more embodiments. The apparatus 500 comprises areceiver device 510 configured to receive the semiconductor wafer. Thesemiconductor wafer has: a semiconductor body; an insulation layer onthe semiconductor body; an active region with a power semiconductor die,the active region forming a part of the semiconductor body; a scribelineregion arranged adjacent to the active region; a passivation structurearranged above the insulation layer and so as to expose a section of theinsulation layer, the exposed section being terminated by a terminationedge of the passivation structure; an optically detectable referencefeature configured to serve as a reference position during a waferseparation processing stage. The optically detectable reference featureis: (i) included in the active region, (ii) spatially displaced from thetermination edge, and (iii) exposed by the passivation structure.

The apparatus 500 further comprises: a detector 520 configured toacquire position data 521 indicative of a position of the opticallydetectable reference feature; a computing device 530 configured toreceive the position data 521 and course data 531, the course data 531being associated with the semiconductor wafer and defining a course ofthe at least one scribeline region with respect to the position of theat least one optically detectable reference feature; and a waferseparation device 540 coupled to the computing device 530 and configuredto separate the semiconductor wafer into the plurality of powersemiconductor dies, wherein the computing device 530 is configured tocontrol the wafer separation device 540 based on the position data 521and the course data 531.

Regarding optional implementations of the components of the received(cf. receiver device 510) semiconductor wafer (cf. reference numeral 200in the drawings), it is referred to the above. E.g., what has beendescribed above with respect to the semiconductor body 10, theinsulation layer 11 the active region 210, scribeline region 220, thepassivation structure 13 and the optically detectable reference feature12 may equally apply to the corresponding components of thesemiconductor wafer received by the apparatus 500.

The apparatus 500 may be configured to move the receiver device 510 andthe wafer separation device 540 relative to each other, e.g., by keepingthe wafer separation device 540 stationary and by moving the receiverdevice 510 (i.e., the wafer 200 received therewith). To this end,displacement means (not illustrated) may be included by the apparatus500, and the computing device 530 may be configured to control therelative movement by correspondingly controlling the displacement means.For example, for controlling the relative movement, the computing device530 may be operatively coupled to at least one of the wafer separationdevice 540 and the receiver device 510.

The wafer separation device 540 may be configured to carry out at leastone of a laser dicing, a sawing and a plasma etching processing step soas to effect the wafer separation along the scribeline 220.

The detector 520 may be configured to acquire an image of the wafer 200and to carry out an OCR processing step so as to acquire the positiondata, wherein the position data may be indicative of the position (i.e.,location) of the optically detectable reference feature 12 and,optionally, also indicative of the layout of the optically detectablereference feature 12, as explained above.

For example, the detector 520 includes an optical microscope.

The detector 520 can provide the position data to the computing device530. The computing device 530 may comprise a controller of thesemiconductor wafer separation apparatus 500 and may comprise several,e.g., distributed, computing subunits for carrying out appropriatecontrol of the semiconductor wafer separation apparatus 500.

The course data 531 can be provided to the computing device 530 in anysuitable manner, e.g., by means of communication interface. For example,the course data may be generated during the semiconductor waferproduction process, e.g., after forming the one or more opticallydetectable reference features 12. E.g., each semiconductor wafer isuniquely associated with an individual set of course data 531; once theapparatus 500 identifies the received semiconductor wafer 200, it maydetermine the course data 531 associated therewith.

As explained above, the course data may define the course of thescribeline 210 relative to the position/layout of the opticallydetectable reference feature 12. Hence, based on the position data 521and based on the course data 531, the computing device 530 may controlthe wafer separation processing stage.

In accordance with one or more embodiments described herein, theoptically detectable reference feature 12 forms an alignment structurebased on which the wafer separation processing stage, e.g. the controlof the relative movement between a wafer separation device and the waferduring the wafer separation, can be carried out. For example, if thewafer separation is based on a sawing processing step, the opticallydetectable reference feature 12 forms the sawing alignment structure,wherein the wafer separation may certainly, as has been explained above,additionally or alternatively be based on a laser dicing processing stepand/or the plasma etching processing step.

Spatially relative terms such as “under”, “below”, “lower”, “over”,“upper” and the like, are used for ease of description to explain thepositioning of one element relative to a second element. These terms areintended to encompass different orientations of the respective device inaddition to different orientations than those depicted in the figures.Further, terms such as “first”, “second”, and the like, are also used todescribe various elements, regions, sections, etc. and are also notintended to be limiting. Like terms refer to like elements throughoutthe description. As used herein, the terms “having”, “containing”,“including”, “comprising”, “exhibiting” and the like are open endedterms that indicate the presence of stated elements or features, but donot preclude additional elements or features.

With the above range of variations and applications in mind, it shouldbe understood that the present invention is not limited by the foregoingdescription, nor is it limited by the accompanying drawings. Instead,the present invention is limited only by the following claims and theirlegal equivalents.

What is claimed is:
 1. A semiconductor wafer, comprising: asemiconductor body; an insulation layer on the semiconductor body; ascribeline region designated to be subjected to a wafer separationprocessing stage; and an optically detectable reference featurelaterally spaced inward from the scribeline region and configured to bea reference position during the wafer separation processing stage. 2.The semiconductor wafer of claim 1, wherein the optically detectablereference feature extends into the semiconductor body.
 3. Thesemiconductor wafer of claim 1, wherein the optically detectablereference feature comprises a trench structure.
 4. The semiconductorwafer of claim 3, wherein the trench structure includes at least oneelectrically floating trench electrode.
 5. The semiconductor wafer ofclaim 1, further comprising processed portions formed within ahorizontal sublayer of the semiconductor body, the horizontal sublayerbeing arranged below and in contact with the insulation layer, whereinthe optically detectable reference feature extends into the horizontalsublayer.
 6. The semiconductor wafer of claim 5, wherein the opticallydetectable reference feature and at least one component of the processedportions have a common vertical extension range of at least 20% of atotal extension of the at least one component of the processed portionsalong a vertical direction.
 7. The semiconductor wafer of claim 6,wherein the at least one component of the processed portions includes aplurality of trenches, and wherein the optically detectable referencefeature has substantially the same total extension along the verticaldirection as the plurality of the trenches.
 8. The semiconductor waferof claim 1, wherein the optically detectable reference feature extendsinto a subsection of the exposed section of the insulation layer.
 9. Thesemiconductor wafer of claim 1, wherein the optically detectablereference feature comprises one or more contact plugs that extend intothe insulation layer.
 10. The semiconductor wafer of claim 1, whereinthe optically detectable reference feature has, in a horizontalcross-section, a non-symmetrical layout.
 11. The semiconductor wafer ofclaim 1, wherein the optically detectable reference feature is made ofone or more non-metal materials different from a material of thepassivation structure.
 12. The semiconductor wafer of claim 1, wherein aspatial confinement of a course of the scribeline region is devoid ofany portion of the optically detectable reference feature.
 13. Thesemiconductor wafer of claim 1, wherein the insulation layer at leastpartially covers the scribeline region.
 14. The semiconductor wafer ofclaim 1, wherein the optically detectable reference feature is notcovered by the insulation layer.
 15. The semiconductor wafer of claim 1,further comprising: an active region with a power semiconductor die, theactive region forming a part of the semiconductor body, wherein thescribeline region is arranged adjacent to the active region, wherein theoptically detectable reference feature is included in the active region.16. The semiconductor wafer of claim 1, further comprising: apassivation structure arranged above the insulation layer and exposing asection of the insulation layer, wherein the exposed section of theinsulation layer is terminated by a termination edge of the passivationstructure, wherein the optically detectable reference feature isspatially displaced from the termination edge and exposed by thepassivation structure.
 17. A method of processing a semiconductor waferhaving a semiconductor body, an insulation layer on the semiconductorbody, a scribeline region designated to be subjected to a waferseparation processing stage, and an optically detectable referencefeature laterally spaced inward from the scribeline region andconfigured to be a reference position during the wafer separationprocessing stage, the method comprising: acquiring position dataindicative of a position of the optically detectable reference feature;and controlling a relative movement between the semiconductor wafer anda wafer separation device based on the position data.
 18. The method ofclaim 17, wherein acquiring the position data comprises an opticalcharacter recognition processing step.
 19. The method of claim 17,further comprising: providing course data which defines a course of thescribeline region with respect to the position of the opticallydetectable reference feature, wherein controlling the relative movementcomprises moving the semiconductor wafer relative to the waferseparation device based on the course data.
 20. The method of claim 17,further comprising: separating the semiconductor wafer into at least twowafer components by causing the wafer separation device to break thesemiconductor wafer along the scribeline region while maintaining theoptically detectable reference feature.
 21. The method of claim 17,wherein the semiconductor wafer further comprises a passivationstructure arranged above the insulation layer and exposing a section ofthe insulation layer, wherein the exposed section of the insulationlayer is terminated by a termination edge of the passivation structure,wherein the optically detectable reference feature is spatiallydisplaced from the termination edge and exposed by the passivationstructure, and wherein controlling the relative movement between thesemiconductor wafer and the wafer separation device occurs independentlyfrom a course of the termination edge of the passivation structure. 22.A power semiconductor die, comprising: a semiconductor body; aninsulation layer on the semiconductor body; a remaining portion of asemiconductor wafer scribeline region; and an optically detectablereference feature laterally spaced inward from the remaining portion ofthe semiconductor wafer scribeline region.
 23. A semiconductor waferseparation apparatus for separating a semiconductor wafer into aplurality of power semiconductor dies, the semiconductor waferseparation apparatus comprising: a receiver device configured to receivethe semiconductor wafer, the semiconductor wafer comprising: asemiconductor body; an insulation layer on the semiconductor body; ascribeline region designated to be subjected to a wafer separationprocessing stage; and an optically detectable reference featurelaterally spaced inward from the scribeline region; a detectorconfigured to acquire position data indicative of a position of theoptically detectable reference feature; a computing device configured toreceive the position data and course data, the course data beingassociated with the semiconductor wafer and defining a course of thescribeline region with respect to the position of the opticallydetectable reference feature; and a wafer separation device configuredto separate the semiconductor wafer into the plurality of powersemiconductor dies, wherein the computing device is configured tocontrol the wafer separation device based on the position data and thecourse data.